Tribological effects of loose alumina abrasive assisted sapphire lapping by a fixed agglomerated diamond abrasive pad (FADAP)

作者：Jiapeng Chen, Yanan Peng, Zhankui Wang, Tao Sun, Jianxiu Su, Dunwen Zuo, Yongwei Zhu · 发表于：Materials Science in Semiconductor Processing · 年份：2022 · DOI：10.1016/j.mssp.2022.106556 · 被引用次数：34 · 研究领域：Advanced Surface Polishing Techniques、Diamond and Carbon-based Materials Research、Advanced machining processes and optimization