Design and analysis of a high-resolution micro-optical accelerometer with an electromagnetic driver

作者：Shan Gao, Zhou Zhen, Changkun Feng, Zhuang Huang, Lishuang Feng · 年份：2021 · DOI：10.1117/12.2601347 · 被引用次数：3 · 研究领域：Photonic and Optical Devices、Advanced MEMS and NEMS Technologies、Advanced Fiber Optic Sensors

Optical displacement detection is widely used in various MEMS sensors because of its high sensitivity. The optical accelerometer has a high theoretical resolution. To increase the measurement range, we proposed a high-resolution micro-optical accelerometer with electromagnetic force feedback. The optical principle, mechanical structure, and manufacturing process are analyzed. The accelerometer is predicted to work in the first modal with displacement sensitivity at 605 nm/g, corresponding to 0th diffraction beam optical sensitivity 1.1 %/nm. The designed electromagnetic driver can increase the acceleration measurement range from 0.066 g to ±20 g. These results provide a theoretical basis for the design and fabrication of a high-resolution micro-optical accelerometer with an electromagnetic driver.