Hyperdoping of silicon films with titanium via nanosecond-laser melting: Structure evolution, impurity distribution, sub-bandgap formation, and doping mechanism

作者：C. Wen, Zhenqi Shi, J.X. Wang, Jiajie Tang, Y.B. Zhang, Yuping Jiang, Y.J. Ma, X.H. Li, Wenjie Yang · 发表于：Optics & Laser Technology · 年份：2021 · DOI：10.1016/j.optlastec.2021.107637 · 被引用次数：13 · 研究领域：Thin-Film Transistor Technologies、Silicon Nanostructures and Photoluminescence、Laser Material Processing Techniques