Effect of O2/Ar flow ratio and heat treatment on the structure and properties of SiO2 film prepared by magnetron sputtering

作者：Luoshu Wang, Changjiang Zhao, Leran Zhao, Xiaowei Fan, Qingguo Wang, Juncheng Liu · 发表于：Physica B Condensed Matter · 年份：2021 · DOI：10.1016/j.physb.2021.413537 · 被引用次数：9 · 研究领域：ZnO doping and properties、Surface Modification and Superhydrophobicity、Optical Coatings and Gratings