A high throughput study of both compositionally graded and homogeneous Fe–Pt thin films

作者：Yuan Hong, Isabelle Gomes de Moraes, Gabriel Gomez, S. Grenier, E. Bellet‐Amalric, André Dias, M. Bonfim, L. Ranno, Thibaut Devillers, Nora M. Dempsey · 发表于：Journal of Materials Research and Technology · 年份：2022 · DOI：10.1016/j.jmrt.2022.03.055 · 被引用次数：16 · 研究领域：Magnetic properties of thin films、Magnetic Properties and Applications、Magnetic Properties of Alloys

Compositionally graded Fe–Pt thin films were prepared on stationary 100 mm Si substrates by magnetron sputtering a base target of Fe on which a piece of Pt is asymmetrically positioned. Energy dispersive X-ray analysis was used to map the variation in film composition across the substrate, as a function of the size of the Pt piece. A scanning polar Magneto-Optical-Kerr-Effect system was used to probe the influence of composition and post-deposition annealing conditions (temperature and time) on coercivity. In this way, the maximum coercivity achievable for the sputtering system used could be established in a high throughput fashion. The evolution in coercivity with composition was correlated with the formation of L10 FePt and changes in its lattice parameters, as determined by scanning X-ray diffraction. High throughput coercivity mapping was then carried out on homogeneous Fe–Pt thin films of different compositions treated to different annealing conditions. This study serves as a step towards the integration of coercive FePt films into collectively fabricated devices.