Transparent and conductive IZO films: Oxygen and discharge voltage controlled sputtering growth and properties

作者：Pei Lei, Xiaoting Chen, Yue Yan, Jingjing Peng, Changshan Hao, Jianchao Ji, Zhongqi Huo · 发表于：Vacuum · 年份：2021 · DOI：10.1016/j.vacuum.2021.110645 · 被引用次数：19 · 研究领域：ZnO doping and properties、Thin-Film Transistor Technologies、Gas Sensing Nanomaterials and Sensors