Monolithic optical microlithography of high-density elastic circuits

作者：Yu‐Qing Zheng, Yuxin Liu, Donglai Zhong, Shayla Nikzad, Shuhan Liu, Zhiao Yu, Deyu Liu, Hung‐Chin Wu, Chenxin Zhu, Jinxing Li, Helen Tran, Jeffrey B.‐H. Tok, Zhenan Bao · 发表于：Science · 年份：2021 · DOI：10.1126/science.abh3551 · 被引用次数：396 · 研究领域：Advanced Sensor and Energy Harvesting Materials、Nanomaterials and Printing Technologies、Nanofabrication and Lithography Techniques

Polymeric electronic materials have enabled soft and stretchable electronics. However, the lack of a universal micro/nanofabrication method for skin-like and elastic circuits results in low device density and limited parallel signal recording and processing ability relative to silicon-based devices. We present a monolithic optical microlithographic process that directly micropatterns a set of elastic electronic materials by sequential ultraviolet light-triggered solubility modulation. We fabricated transistors with channel lengths of 2 micrometers at a density of 42,000 transistors per square centimeter. We fabricated elastic circuits including an XOR gate and a half adder, both of which are essential components for an arithmetic logic unit. Our process offers a route to realize wafer-level fabrication of complex, high-density, and multilayered elastic circuits with performance rivaling that of their rigid counterparts.