Design of a flexure-based parallel XY micropositioning stage with millimeter workspace and high bandwidth

作者：Ting-Wei Wang, Yingzi Li, Yingxu Zhang, Rui Lin, Jianqiang Qian, Zhipeng Dou · 发表于：Sensors and Actuators A Physical · 年份：2021 · DOI：10.1016/j.sna.2021.112899 · 被引用次数：35 · 研究领域：Piezoelectric Actuators and Control、Advanced MEMS and NEMS Technologies、Nanofabrication and Lithography Techniques