Graded intrafillable architecture-based iontronic pressure sensor with ultra-broad-range high sensitivity

作者：Ningning Bai, Liu Wang, Qi Wang, Jue Deng, Yan Wang, Peng Lü, Jun Huang, Gang Li, Yuan Zhang, Junlong Yang, Kewei Xie, Xuanhe Zhao, Chuan Fei Guo · 发表于：Nature Communications · 年份：2020 · DOI：10.1038/s41467-019-14054-9 · 被引用次数：803 · 研究领域：Advanced Sensor and Energy Harvesting Materials、Gas Sensing Nanomaterials and Sensors、Analytical Chemistry and Sensors

Abstract Sensitivity is a crucial parameter for flexible pressure sensors and electronic skins. While introducing microstructures (e.g., micro-pyramids) can effectively improve the sensitivity, it in turn leads to a limited pressure-response range due to the poor structural compressibility. Here, we report a strategy of engineering intrafillable microstructures that can significantly boost the sensitivity while simultaneously broadening the pressure responding range. Such intrafillable microstructures feature undercuts and grooves that accommodate deformed surface microstructures, effectively enhancing the structural compressibility and the pressure-response range. The intrafillable iontronic sensor exhibits an unprecedentedly high sensitivity (Smin > 220 kPa−1) over a broad pressure regime (0.08 Pa-360 kPa), and an ultrahigh pressure resolution (18 Pa or 0.0056%) over the full pressure range, together with remarkable mechanical stability. The intrafillable structure is a general design expected to be applied to other types of sensors to achieve a broader pressure-response range and a higher sensitivity.