Double speckle pattern interferometric measurements for micro-angular displacement and the center of rotation

作者：Minyang Wu, Guangchen Lu, Yinhang Ma, Fujun Yang · 发表于：Optics Letters · 年份：2019 · DOI：10.1364/ol.45.000188 · 被引用次数：7 · 研究领域：Optical measurement and interference techniques、Surface Roughness and Optical Measurements、Digital Holography and Microscopy

Double speckle pattern interferometry is presented for the measurement of in-plane rotation angle, sign, and center of rotation. The technique employs two conventional in-plane sensitive electronic speckle pattern interferometry systems combined with two-wavelength laser illumination and a phase-shifting method. Angular displacement of micro-rotation including the sign is determined from the wrapped phase difference, and the center of rotation is located by using wrapped phase difference maps related to two-directional displacement. The test setup is described and experimental results indicate that the system can provide angular displacement measurement with accuracy of 1.8 arcsec.