Trajectory planning of optical polishing based on optimized implementation of dwell time

作者：Tian Huang, Dong Zhao, Zhong-Chen Cao · 发表于：Precision Engineering · 年份：2019 · DOI：10.1016/j.precisioneng.2019.12.006 · 被引用次数：36 · 研究领域：Advanced Surface Polishing Techniques、Advanced Numerical Analysis Techniques、Advanced Measurement and Metrology Techniques