Microelectromechanical Systems for Nanomechanical Testing: Electrostatic Actuation and Capacitive Sensing for High-Strain-Rate Testing

作者：Cai Li, D. Zhang, Guangming Cheng, Yong Zhu · 发表于：Experimental Mechanics · 年份：2019 · DOI：10.1007/s11340-019-00565-5 · 被引用次数：24 · 研究领域：Mechanical and Optical Resonators、Advanced MEMS and NEMS Technologies、Force Microscopy Techniques and Applications