Design of A flexure-based mixed-kinematic XY high-precision positioning platform with large range

作者：Rui Lin, Yingzi Li, Yingxu Zhang, Tingwei Wang, Zhenyu Wang, Zihang Song, Zhipeng Dou, Jianqiang Qian · 发表于：Mechanism and Machine Theory · 年份：2019 · DOI：10.1016/j.mechmachtheory.2019.103609 · 被引用次数：42 · 研究领域：Piezoelectric Actuators and Control、Force Microscopy Techniques and Applications、Advanced MEMS and NEMS Technologies