A Flexible Piezoelectret Actuator/Sensor Patch for Mechanical Human–Machine Interfaces

作者：Junwen Zhong, Yuan Ma, Yu Song, Qize Zhong, Yao Chu, Ilbey Karakurt, David B. Bogy, Liwei Lin · 发表于：ACS Nano · 年份：2019 · DOI：10.1021/acsnano.9b02437 · 被引用次数：215 · 研究领域：Advanced Sensor and Energy Harvesting Materials、Tactile and Sensory Interactions、Dielectric materials and actuators

Flexible and wearable devices with the capabilities of both detecting and generating mechanical stimulations are critical for applications in human–machine interfaces, such as augmented reality (AR) and virtual reality (VR). Herein, a flexible patch based on a sandwiched piezoelectret structure is demonstrated to have a high equivalent piezoelectric coefficient of d 33 at 4050 pC/N to selectively perform either the actuating or sensing function. As an actuator, mechanical vibrations with a peak output force of more than 20 mN have been produced, similar to those from the vibration mode of a modern cell phone, and can be easily sensed by human skin. As a sensor, both the pressure detection limit of 1.84 Pa for sensing resolution and excellent stability of less than 1% variations in 6000 cycles have been achieved. The design principle together with the sensing and driving characteristics can be further developed and extended to other soft matters and flexible devices.