Molecular dynamics simulation study of the microstructure of a-Si:H thin film grown by oblique-angle deposition

作者：Yaorong Luo, Maohua Lin, Naigen Zhou, Haibin Huang, Chi-Tay Tsai, Lang Zhou · 发表于：Physica B Condensed Matter · 年份：2018 · DOI：10.1016/j.physb.2018.05.042 · 被引用次数：11 · 研究领域：Thin-Film Transistor Technologies、Optical Coatings and Gratings、Advanced Surface Polishing Techniques