Growth of high-Sn content (28%) GeSn alloy films by sputtering epitaxy

作者：Jun Zheng, Zhi Liu, Yongwang Zhang, Yuhua Zuo, Chuanbo Li, Chunlai Xue, Buwen Cheng, Qiming Wang · 发表于：Journal of Crystal Growth · 年份：2018 · DOI：10.1016/j.jcrysgro.2018.04.008 · 被引用次数：56 · 研究领域：Photonic and Optical Devices、Advanced Photonic Communication Systems、Optical Network Technologies