A Digitally Controlled Fully Integrated Voltage Regulator With 3-D-TSV-Based On-Die Solenoid Inductor With a Planar Magnetic Core for 3-D-Stacked Die Applications in 14-nm Tri-Gate CMOS

作者：Harish K. Krishnamurthy, Sheldon Weng, George E. Mathew, Nachiket Desai, Ruchir Saraswat, Krishnan Ravichandran, James Tschanz, Vivek De · 发表于：IEEE Journal of Solid-State Circuits · 年份：2017 · DOI：10.1109/jssc.2017.2773637 · 被引用次数：48 · 研究领域：Silicon Carbide Semiconductor Technologies、Advanced DC-DC Converters、Thin-Film Transistor Technologies

A fully integrated digitally controlled buck voltage regulator, featuring hysteretic and pulse frequency modulation control for maximum light load efficiency, with 3-D throughsilicon-via-based on-die solenoid inductor with a planar magnetic core in 14-nm tri-gate CMOS, demonstrates 111 nH/mm2inductance density and 80% conversion efficiency. The inductance density demonstrated is 20× higher than comparable on-die lateralor spiral-based inductor densities leading to higher light load efficiency.