Intelligent tuning method of PID parameters based on iterative learning control for atomic force microscopy

作者：Hui Liu, Yingzi Li, Yingxu Zhang, Yifu Chen, Zihang Song, Zhenyu Wang, Suoxin Zhang, Jianqiang Qian · 发表于：Micron · 年份：2017 · DOI：10.1016/j.micron.2017.09.009 · 被引用次数：31 · 研究领域：Iterative Learning Control Systems、Advanced Measurement and Metrology Techniques、Advanced Surface Polishing Techniques