Nonlinearity measurement for low-pressure encapsulated MEMS gyroscopes by transient response

作者：Yumiao Wei, Yonggui Dong, Xianxiang Huang, Zhili Zhang · 发表于：Mechanical Systems and Signal Processing · 年份：2017 · DOI：10.1016/j.ymssp.2017.07.034 · 被引用次数：16 · 研究领域：Mechanical and Optical Resonators、Advanced MEMS and NEMS Technologies、Acoustic Wave Resonator Technologies