Ultrasensitive Pressure Detection of Few‐Layer MoS 2

作者：Feifan Yu, Qianwen Liu, Xin Gan, Mingxiang Hu, Tianyi Zhang, Cheng Li, Feiyu Kang, Mauricio Terrones, Ruitao Lv · 发表于：Advanced Materials · 年份：2016 · DOI：10.1002/adma.201603266 · 被引用次数：125 · 研究领域：2D Materials and Applications、Advanced Sensor and Energy Harvesting Materials、MXene and MAX Phase Materials

Ultrasensitive pressure sensors are constructed with few-layer MoS2 films. As-designed Fabry–Perot (F–P) sensors exhibit nearly synchronous pressure–deflection responses with a very high sensitivity (89.3 nm Pa−1), which is three orders of magnitude higher than those of conventional diaphragm materials (e.g., silica, silver films). This kind of F–P sensor may open up new avenues for 2D materials in biomedical and environmental applications.