Relative Humidity Measurement Technology Based on Microcantilever Resonance

作者：Chunguang Hu · 发表于：Nanotechnology and Precision Engineering · 年份：2007 · 被引用次数：1 · 研究领域：Mechanical and Optical Resonators、Analytical Chemistry and Sensors、Advanced MEMS and NEMS Technologies

A novel relative humidity measurement method based on microcantilever resonance was presented to construct the theoretical relationship between the resonant frequency and the relative humidity. The ambient relative humidity can be detected by measuring the resonant frequency. Experiments were conducted with piezoelectric microcantilever under direct excitation. And the relationship curve between the resonant frequency and relative humidity in a range of 30%—80% was obtained. The results show that the microcantilever resonance-based humidity measurement method can achieve the resolution of 0.2%RH and the precision of ±2.0%RH. This kind of humidity sensor has the advantages of small volume, fast response and high precision, and therefore has a good foreground in micro electromechanical system(MEMS) and micro total analysis systems(μ-TAS).