A highly efficient CMOS nanoplasmonic crystal enhanced slow-wave thermal emitter improves infrared gas-sensing devices

作者：Andreas Pusch, Andrea De Luca, Sang Soon Oh, Sebastian Wuestner, Tyler Roschuk, Yiguo Chen, Sophie Boual, Zeeshan Ali, Chris C. Phillips, Minghui Hong, Stefan A. Maier, Florin Udrea, Richard Hopper, Ortwin Hess · 发表于：Scientific Reports · 年份：2015 · DOI：10.1038/srep17451 · 被引用次数：53 · 研究领域：Plasmonic and Surface Plasmon Research、Thermal Radiation and Cooling Technologies、Strong Light-Matter Interactions

The application of plasmonics to thermal emitters is generally assisted by absorptive losses in the metal because Kirchhoff's law prescribes that only good absorbers make good thermal emitters. Based on a designed plasmonic crystal and exploiting a slow-wave lattice resonance and spontaneous thermal plasmon emission, we engineer a tungsten-based thermal emitter, fabricated in an industrial CMOS process, and demonstrate its markedly improved practical use in a prototype non-dispersive infrared (NDIR) gas-sensing device. We show that the emission intensity of the thermal emitter at the CO(2) absorption wavelength is enhanced almost 4-fold compared to a standard non-plasmonic emitter, which enables a proportionate increase in the signal-to-noise ratio of the CO(2) gas sensor.