LiNbO3Thin-Film Modulators Using Silicon Nitride Surface Ridge Waveguides

作者：Shilei Jin, Longtao Xu, Haihua Zhang, Yifei Li · 发表于：IEEE Photonics Technology Letters · 年份：2015 · DOI：10.1109/lpt.2015.2507136 · 被引用次数：129 · 研究领域：Photonic and Optical Devices、Advanced Fiber Laser Technologies、Photorefractive and Nonlinear Optics

Lithium niobate (LiNbO3) is an excellent electrooptic material due to its low loss, large electrooptic coefficient, linear modulation response, and large modulation bandwidth. In this letter, we present the first LiNbO3thin-film Mach-Zehnder optical modulator that employs silicon nitride surface ridge optical waveguides. The modulator contains a 1.2-cm-long push-pull phase modulation section and a pair of multimode interferometric 3-dB couplers. It demonstrated Vπ· L of ~3 V · cm and a 3-dB bandwidth of ~8 GHz.