A study on phase transformation of SnOx thin films prepared by reactive magnetron sputtering

作者：Li Guo, Ming Zhao, Daming Zhuang, Qianming Gong, Hao Tan, Mingjie Cao, Liangqi Ouyang · 发表于：Materials Science in Semiconductor Processing · 年份：2016 · DOI：10.1016/j.mssp.2015.10.008 · 被引用次数：24 · 研究领域：ZnO doping and properties、Gas Sensing Nanomaterials and Sensors、Transition Metal Oxide Nanomaterials