Heteroepitaxial growth of TiN thin films on Si substrates for MEMS applications

作者：Wenfeng Xiang, Chongyang Zhao, Kun Liu, Guling Zhang, Kun Zhao · 发表于：Journal of Alloys and Compounds · 年份：2015 · DOI：10.1016/j.jallcom.2015.11.009 · 被引用次数：13 · 研究领域：Metal and Thin Film Mechanics、GaN-based semiconductor devices and materials、Semiconductor materials and devices