Correction of Abbe error in involute gear measurement using a laser interferometric system

作者：Lin Hu, Zi Xue, Guoliang Yang · 发表于：Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 年份：2015 · DOI：10.1117/12.2202556 · 被引用次数：1 · 研究领域：Advanced Measurement and Metrology Techniques、Scientific Measurement and Uncertainty Evaluation、Advanced Sensor Technologies Research

For correction of Abbe error in involute gear measurement, a laser interferometric measuring system is applied, in this system, the laser beam is split into two paths, one path is arranged tangent to the base circle of gear for measurement of profile, another path is arranged parallel to the gear axis for measurement of helix, two cube-corner reflectors are attached at the end of probe stylus closing to the tip, by this approach, the length offset between probe tip and reference scale is minimized , finally, the Abbe error is decreased. On another hand, the laser measuring error is caused by bending of stylus, the mathematic relationship between amount of bending and probe deflection is deduced. To determine the parameters in this mathematic relationship, two sizes of stylus are used for experiments. Experiments are carried out in a range of ±0.8mm for probe deflection. Results show that the amount of stylus bending is linear with deflection of probe, the laser measuring error caused by stylus bending will be smaller than 0.3μm after correction.