Microstructure and surface properties of chromium-doped diamond-like carbon thin films fabricated by high power pulsed magnetron sputtering

作者：Zhongzhen Wu, Xiubo Tian, Gang Gui, Chunzhi Gong, Shiqin Yang, Paul K. Chu · 发表于：Applied Surface Science · 年份：2013 · DOI：10.1016/j.apsusc.2013.02.104 · 被引用次数：33 · 研究领域：Diamond and Carbon-based Materials Research、Metal and Thin Film Mechanics、Ion-surface interactions and analysis