High-Q Solenoidal Inductive Elements

作者：Zhiping Feng, Christopher A. Bower, James Carlson, Matthew Lueck, D. Temple, M.B. Steer · 发表于：IEEE MTT-S International Microwave Symposium digest · 年份：2007 · DOI：10.1109/mwsym.2007.380145 · 被引用次数：9 · 研究领域：Radio Frequency Integrated Circuit Design、Advanced Antenna and Metasurface Technologies、Energy Harvesting in Wireless Networks

A solenoid-like magnetic-storage element embedded in high-resistivity silicon is presented that maintains well-defined signal and signal return-paths. By not being focused on creating a lumped inductor equivalent, the design space is opened up. At 5 GHz an effective inductance of 1.9 nH with a Q of 30 increasing to a 10.6 nH inductance with a Q of 11 were achieved.