Silicon photonics: from a microresonator perspective

作者：Shiyong Feng, Ting Lei, Hui Chen, Hong Cai, Xianshu Luo, Andrew W. Poon · 发表于：Laser & Photonics Review · 年份：2011 · DOI：10.1002/lpor.201100020 · 被引用次数：239 · 研究领域：Photonic and Optical Devices、Silicon Nanostructures and Photoluminescence、Mechanical and Optical Resonators

Abstract Silicon photonics leverages the optical, electrical and material properties of silicon and the mature complementary metal‐oxide semiconductor (CMOS) nanofabrication technique to develop on‐chip photonic integration, which has been making significant impacts in various frontiers including next‐generation optical communications networks, on‐chip optical interconnects for high‐speed energy‐efficient computing and biosensing. Among many optical structures fabricated on silicon chips, microresonators due to their high‐Q resonances and small footprints play important roles in various devices including lasers, filters, modulators, switches, routers, delays, detectors and sensors. This paper reviews from a microresonator perspective some of the latest progress in the field, summarizes design considerations in various applications and points out key challenges and potentials.