Wafer-Scale Synthesis and Transfer of Graphene Films

作者：Youngbin Lee, Sukang Bae, Houk Jang, Sukjae Jang, Shou-En Zhu, Sung Hyun Sim, Young Il Song, Byung Hee Hong, Jong‐Hyun Ahn · 发表于：Nano Letters · 年份：2010 · DOI：10.1021/nl903272n · 被引用次数：1131 · 研究领域：Graphene research and applications、Advanced Sensor and Energy Harvesting Materials、Advanced Memory and Neural Computing

We developed means to produce wafer scale, high-quality graphene films as large as 3 in. wafer size on Ni and Cu films under ambient pressure and transfer them onto arbitrary substrates through instantaneous etching of metal layers. We also demonstrated the applications of the large-area graphene films for the batch fabrication of field-effect transistor (FET) arrays and stretchable strain gauges showing extraordinary performances. Transistors showed the hole and electron mobilities of the device of 1100 +/- 70 and 550 +/- 50 cm(2)/(V s) at drain bias of -0.75 V, respectively. The piezo-resistance gauge factor of strain sensor was approximately 6.1. These methods represent a significant step toward the realization of graphene devices in wafer scale as well as application in optoelectronics, flexible and stretchable electronics.