Magnetic micro-actuators and systems (MAGMAS)

作者：O. Cugat, Jérôme Delamare, G. Reyne · 发表于：IEEE Transactions on Magnetics · 年份：2003 · DOI：10.1109/tmag.2003.816763 · 被引用次数：351 · 研究领域：Metallic Glasses and Amorphous Alloys、Magnetic properties of thin films、Adhesion, Friction, and Surface Interactions

Magnetic interactions provide outstanding performances for powerful integrated micro-actuators. This paper explains how magnetic interactions involving permanent magnets, currents, and various magnetic materials remain very effective and even improve as dimensions are reduced. The technological problems that have slowed the development of magnetic micro-actuators and systems (MAGMAS) are progressively being solved. As long as materials scientists continue to develop better thick-film patterned permanent magnets compatible with microsystem technologies, MAGMAS will have a promising future.