3D negative electrode stacks for integrated all-solid-state lithium-ion microbatteries

作者：Loïc Baggetto, Harm C. M. Knoops, Rogier A. H. Niessen, W. M. M. Kessels, Peter H. L. Notten · 发表于：Journal of Materials Chemistry · 年份：2010 · DOI：10.1039/b926044g · 被引用次数：75 · 研究领域：Advancements in Battery Materials、Supercapacitor Materials and Fabrication、Advanced Battery Materials and Technologies

The deposition feasibility and electrochemical evaluation of highly structured negative electrode stacks for 3D-integrated batteries is demonstrated. The stacks comprise a TiN thin film, serving as both current collector and Li-barrier layer, covered by a polycrystalline Si (poly-Si) thin film as electrode material. In comparison with planar films, these poly-Si films present a storage capacity increase of about 5× for the highest pore aspect ratio electrodes. The step coverage of poly-Si can be considerably improved by growing TiN and poly-Si into wide trenches. This results in much smoother poly-Si films and significantly improved step coverage. Further optimization of the trench dimensions should result in poly-Si films with a Li-storage capacity increase of more than one order of magnitude with respect to planar films.