Micrograph and structure of CrN films prepared by plasma immersion ion implantation and deposition using HPPMS plasma source

作者：Zhongzhen Wu, Xiubo Tian, Chunzhi Gong, Shiqin Yang, Paul K. Chu · 发表于：Surface and Coatings Technology · 年份：2012 · DOI：10.1016/j.surfcoat.2012.04.012 · 被引用次数：17 · 研究领域：Metal and Thin Film Mechanics、Diamond and Carbon-based Materials Research、Ion-surface interactions and analysis