Surface tension powered self-assembly of 3-D micro-optomechanical structures

作者：R.R.A. Syms · 发表于：Journal of Microelectromechanical Systems · 年份：1999 · DOI：10.1109/84.809060 · 被引用次数：111 · 研究领域：Advanced MEMS and NEMS Technologies、Mechanical and Optical Resonators、Photonic and Optical Devices

A new surface micromachining process for surface tension powered self-assembly of silicon-based microstructures is described. Mechanical parts are formed from bonded silicon-on-insulator material and rotated out-of-plane by melting photoresist pads at tow temperature. Simple mechanisms that allow accurate control of the final angle are introduced and used to construct fixed 45/spl deg/ mirrors and scanning mirror assemblies.