Integrated thin-film micropotentiometers

作者：Joseph R. Kinard, Dandan Huang, Donald B. Novotny · 发表于：IEEE Transactions on Instrumentation and Measurement · 年份：1995 · DOI：10.1109/19.377856 · 被引用次数：11 · 研究领域：Advanced MEMS and NEMS Technologies、Mechanical and Optical Resonators、Advanced Fiber Optic Sensors

Integrated micropotentiometers, new devices fabricated with thin-film technology and the micromachining of silicon, have been developed for the accurate determination of ac voltage from 1 to 200 mV at frequencies from audio to 1 MHz and with the potential for higher frequencies.>