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Semiconductor photonic integrated circuits

作者:Thomas Koch, Uziel Koren · 发表于:IEEE Journal of Quantum Electronics · 年份:1991 · DOI:10.1109/3.81373 · 被引用次数:304 · 研究领域:Semiconductor Lasers and Optical Devices、Photonic and Optical Devices、Optical Network Technologies

Semiconductor photonic integrated circuits (PICs) refer to that subset of optoelectronic integrated circuits (OEICs) which focus primarily on the monolithic integration of optically interconnected guided-wave optoelectronic devices. The principal motivation for PIC research is the expected cost reduction and packaging robustness associated with replacing individually aligned, single-mode optical connections between discrete optoelectronic devices with lithographically produced integrated waveguides. This field has recently seen significant advances resulting from improved III-V epitaxial crystal growth and related processing techniques. A discussion is presented of the design and fabrication issues, illustrated by a number of recently demonstrated InP-based PICs.>