Properties of NbTiN thin films prepared by reactive DC magnetron sputtering

作者：Hiroaki Myoren, Tamotsu Shimizu, Takashi Iizuka, S. Takada · 发表于：IEEE Transactions on Applied Superconductivity · 年份：2001 · DOI：10.1109/77.919899 · 被引用次数：31 · 研究领域：Metal and Thin Film Mechanics、Particle accelerators and beam dynamics、Physics of Superconductivity and Magnetism

We have prepared Nb/sub 1-x/Ti/sub x/N (NbTiN) thin films by reactive dc magnetron sputtering without intentional heating. Superconducting properties were strongly related to sputtering conditions. Lattice parameters of NbTiN films approached that of bulk NbTiN on decreasing the N/sub 2/ mole fraction in Ar and N/sub 2/ sputtering gas mixture. The film orientation was also strongly related to the sputtering conditions such as gas pressure. NbN thin films could grow epitaxially on MgO(100) substrates and showed very smooth surfaces. We found that smooth NbTiN films could be obtained on MgO(100) substrates with an epitaxially grown NbN template layer.