Piezoelectric MEMS low-level vibration energy harvester with PMN-PT single crystal cantilever

作者：Gang Tang, J.-Q. Liu, Bin Yang, Jiang Luo, H.-S. Liu, Y.-G. Li, Chaoqiang Yang, Dzung Viet Dao, Katsuhiro Tanaka, S. Sugiyama · 发表于：Electronics Letters · 年份：2012 · DOI：10.1049/el.2012.1419 · 被引用次数：21 · 研究领域：Innovative Energy Harvesting Technologies、Energy Harvesting in Wireless Networks、Wireless Power Transfer Systems

A piezoelectric MEMS vibration energy harvester with PMN-PT single material has been developed, which can convert low-level vibration energy into electrical energy. Compared with the conventional piezoelectric material, the PMN-PT single crystal has a higher coupling coefficient and electromechanical coefficient, which can improve the conversion efficiency of the power generating device. The designed device consists of a composite cantilever beam and an Ni proof mass, which is fabricated using UV-LIGA technology. Test results show that the fabricated vibration energy harvester can generate a maximum output power of 2.704 µW with a 2.08 VP-P output voltage, at a resonant frequency of 237.4 Hz and 1.0g acceleration level.