A new scanning tunneling microscope with large field of view and atomic resolution

作者：Guangyi Shang, J. E. Yao, Jinping He · 发表于：Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 年份：1991 · DOI：10.1116/1.585469 · 被引用次数：2 · 研究领域：Force Microscopy Techniques and Applications、Mechanical and Optical Resonators、Advanced MEMS and NEMS Technologies

A new STM which features atomic resolution, large field of view, and an x/y specimen stage has been developed. A dual scanner consisting of a piezomechanical coarse scanner and a piezotube fine scanner has been constructed. It covers a wide scan range from 0.4 nm to 0.2 mm. Searching the specimen area of interest was accomplished by the x/y specimen stage with a range of 4×4 mm2 movement and a resolution of several microns. In order to achieve atomic resolution, rather rigid structure and vibration isolator were adopted. This kind of the instrument would be used in wide variety of projects such as studies of biological specimen, microfabrication, and nonhomogeneous surfaces.