Optical stethoscopy: Image recording with resolution λ/20

作者：Dieter Pohl, Winfried T. Denk, Maximilian Lanz · 发表于：Applied Physics Letters · 年份：1984 · DOI：10.1063/1.94865 · 被引用次数：2033 · 研究领域：Near-Field Optical Microscopy、Integrated Circuits and Semiconductor Failure Analysis、Microwave and Dielectric Measurement Techniques

Subwave length-resolution optical image recording is demonstrated by moving an extremely narrow aperture along a test object equipped with fine-line structures. Details of 25-nm size can be recognized using 488-nm radiation. The result indicates a resolving power of at least λ/20 which is to be compared with the values of λ/2.3 obtainable in conventional optical microscopy.