Blue Electroluminescence of Thin-Film Diamond Made by the Hot-Filament Method

作者：Yasushi Taniguchi, Keiji Hirabayashi, Keiko Ikoma, Noriko Iwasaki Kurihara, Masaaki Matsushima · 发表于：Japanese Journal of Applied Physics · 年份：1989 · DOI：10.1143/jjap.28.l1848 · 被引用次数：21 · 研究领域：Diamond and Carbon-based Materials Research、Semiconductor materials and devices、Thin-Film Transistor Technologies

Blue electroluminescence has been observed in thin-film diamond deposited on a substrate when a mixture of methane and hydrogen gases react under heat treatment by tungsten filament. The diamond active layer is sandwiched between metal oxide insulating layers (HfO2and Al2O3) which are formed by evaporation of metal oxides in oxygen plasma. Indium tin oxide film is used as a transparent electrode. The electroluminescence spectrum shows the peak at 435 nm and luminance is 3.6 cd/m2at an applied voltage of 400 V.