The influence of substrate on the adhesion behaviors of atomic layer deposited aluminum oxide films

作者：Jianning Ding, X. F. Wang, Ningyi Yuan, C.L. Li, Yuanyuan Zhu, B. Kan · 发表于：Surface and Coatings Technology · 年份：2010 · DOI：10.1016/j.surfcoat.2010.10.052 · 被引用次数：22 · 研究领域：Semiconductor materials and devices、Metal and Thin Film Mechanics、Copper Interconnects and Reliability