Large area patterning of single magnetic domains with assistance of ion irradiation in ion milling

作者：Zhenzhong Sun, Dawen Li, Anusha Natarajarathinam, Hao Su, Subhadra Gupta · 发表于：Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 年份：2012 · DOI：10.1116/1.4706893 · 被引用次数：8 · 研究领域：Block Copolymer Self-Assembly、Copper Interconnects and Reliability、Nanofabrication and Lithography Techniques

This study demonstrates a pronounced ion irradiation effect in ion milling of magnetic thin films. In fabrication of bit-patterned media, the ion irradiation could facilitate bit island isolation before complete removal of magnetic materials by ion milling. Combined with block copolymer lithography, sub-20 nm CoPt dots with uniaxial perpendicular anisotropy, resembling Stoner–Wohlfarth-like single domains, were achieved. X-ray diffraction demonstrates that the degradation of the magnetic film by ion irradiation is related to crystal structure damage.