A High–G Metal Capacitive Microaccelerometer with Round Proof Mass Supported by Multi-Beam

作者：Yun Kui Zhang, Feng Cui, Zhen Wan, Kai Li, Wu Liu, Wei Ping Zhang · 发表于：Advanced materials research · 年份：2011 · DOI：10.4028/www.scientific.net/amr.317-319.1843 · 研究领域：Advanced MEMS and NEMS Technologies、Mechanical and Optical Resonators、Acoustic Wave Resonator Technologies

In this paper, differential capacitors sandwiched structure of a high-G capacitive microaccelerometer with round metal proof mass supported by multi-beam and its characteristic are presented. The operation principle and built-in self-calibration and self-test functions are described. The fabrication process and the fabricated chip of the microaccelerometer based on UV-LIGA technology are reported. The detection and closed-loop control circuits of the microaccelerometer are designed and calibrated. The range of the detection channel is ±6pF, the sensitivity is 89.3mV/pF, and the linearity is 2.59%.