Single-crystal silicon high-Q torsional oscillators

作者：Rafael N. Kleiman, G. Kaminsky, J. D. Reppy, Ron Pindak, D. J. Bishop · 发表于：Review of Scientific Instruments · 年份：1985 · DOI：10.1063/1.1138425 · 被引用次数：128 · 研究领域：Advanced MEMS and NEMS Technologies、Mechanical and Optical Resonators、Photonic and Optical Devices

We describe techniques for constructing single-crystal silicon high-Q torsional oscillators. The oscillators are fabricated by the high-precision micromachining of silicon using orientation-dependent etches. We describe methods for using these oscillators as very powerful probes of the mechanical properties of a variety of physical systems.