Application and calibration of a quartz needle sensor for high resolution scanning force microscopy

作者：W. Clauß, J. Zhang, D. J. Bergeron, Alan T. Charlie Johnson · 发表于：Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 年份：1999 · DOI：10.1116/1.590751 · 被引用次数：22 · 研究领域：Force Microscopy Techniques and Applications、Mechanical and Optical Resonators、Near-Field Optical Microscopy

We have investigated a force sensing technique for high-resolution scanning force microscopy which uses a piezoelectric quartz resonator oscillating perpendicular to the direction of the sample surface at a frequency of 1 MHz. The achievement of true atomic resolution on single-wall carbon nanotube surfaces illustrates the promises of this new technique which is especially well suited for ultrahigh vacuum or low-temperature conditions. The force sensitivity and the mechanical amplitude of the sensor oscillation were characterized semiquantitatively.