Efficient electrothermal actuation of multiple modes of high-frequency nanoelectromechanical resonators

作者：Igor Bargatin, Inna Kozinsky, Michael Lee Roukes · 发表于：Applied Physics Letters · 年份：2007 · DOI：10.1063/1.2709620 · 被引用次数：152 · 研究领域：Mechanical and Optical Resonators、Advanced MEMS and NEMS Technologies、Force Microscopy Techniques and Applications

The authors observed resonances from multiple vibrational modes of individual silicon-carbide-based nanomechanical resonators, covering a broad frequency range from several megahertz to over a gigahertz. The devices are actuated thermoelastically in vacuum at room temperature using localized Joule heating in a device-integrated metal loop. Their motion is detected piezoresistively using signal downmixing in a similarly integrated metal piezoresistor. The frequencies and amplitudes of the observed resonant peaks are in good agreement with the results from theoretical modeling and finite-element simulations.