Diamond machining of silicon: A review of advances in molecular dynamics simulation

作者：Saurav Goel, Xichun Luo, Anupam Agrawal, Robert L. Reuben · 发表于：International Journal of Machine Tools and Manufacture · 年份：2014 · DOI：10.1016/j.ijmachtools.2014.09.013 · 被引用次数：480 · 研究领域：Advanced Surface Polishing Techniques、Diamond and Carbon-based Materials Research、Metal and Thin Film Mechanics