Closed loop driving and detect circuit of piezoelectric solid-state micro gyroscope

作者：Yong-Song He, Xiaosheng Wu, Fu Zheng, Wenyuan Chen, Weiping Zhang, Feng Cui, Wu Liu · 发表于：Microsystem Technologies · 年份：2013 · DOI：10.1007/s00542-013-1889-6 · 被引用次数：10 · 研究领域：Advanced MEMS and NEMS Technologies、Acoustic Wave Resonator Technologies、Mechanical and Optical Resonators