Nanometer characterization of single point diamond-turned mirrors on the micrometer and submicrometer scale

作者：Junyi Yu, L.-T. Hou, W. Sh. Ma, Jiang Cao, Jiayan Yu, J. E. Yao · 发表于：Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 年份：1994 · DOI：10.1116/1.587650 · 被引用次数：4 · 研究领域：Laser Material Processing Techniques、Advanced Surface Polishing Techniques、Surface Roughness and Optical Measurements

Single point diamond turning (SPDT) is one of the nanometer machining methods. We deal with the nanometer characterization of diamond-turned mirrors on the micrometer and submicrometer scale with our three-dimensional roughness measuring system based on scanning tunneling microscopy. We have studied the results of amplitude spectral density functions for these surfaces. Finally, we have calculated the total integrated scattering as a function of incident light wavelength λ and root mean square surface roughness σ and the diffracted angle θd as a function of the λ and the surface spatial wavelength λsp. All these measurement results are the basis for improving the SPDT surface quality.